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Mechanical Product & Tools


  • Direct Acting 2-Port Solenoid Valve For Medium Vacuum (Special Purpose Valve)


    Compact direct acting solenoid valve compatible with medium vacuum. Lightweight, compact and has high sealing force, making it ideal for installing in various vacuum systems and equipment.

    • Vacuum leakage rate 1.33 x 10^-6 Pa・㎥/s or less, available in medium vacuum.
    • Lightweight and compact thanks to the thin coil.
    • Optimum selection is possible from 4 coil sizes and multiple orifice sizes.

  • Direct Acting 3-Port Valve


    Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport, air blow, etc.)

    • In addition to high durability, stable responsiveness is realized by prevention of malfunction and snagging due to foreign matter.
    • Upward/lateral common wiring connector and manual override realize ease of use and high maintainability.
    • Valve width 10 mm. Weight 12.5 g.
    • Low vacuum and positive pressure can be freely combined.
    • Universal structure.
    • Selectable flow rate.
    • Large flow rate 0.4 d㎥/(s/bar).
    • Standard: 0.3 d㎥/(s/bar).
    • High response: 4 ±1 ms / 1.5 ±1 ms (ON/OFF).

  • Drain Separator


    Lightweight compact drain separator. The cyclone effect causes water droplets in the compressed air to strike the inner wall of the bowl; this gathers and enlarges them, removing 99% or more of the moisture. Ideal for easy drainage from air piping.

    • Water separation efficiency: 99%.
    • Compatible compressor: 0.75 kW to 37 kW.
    • Modular connection of FX1004 and FX1011 to F.R.L. 3000 and 4000 Series and FX1037 to 6000 and 8000 Series is possible.

  • Drip Prevention Valve


    It has a compact structure that ensures draining and controls the drip prevention with high precision. It can be used to prevent problems such as poor chemical liquid discharge to wafers.

    • It supports optimized custom design according to the fluid viscosity.

  • Ejector With Vacuum Burst Function Single Unit


    High speed suction and burst cycle integrating the ejector and vacuum burst function.

    • Compact and lightweight, it can be used at the end of vacuum piping.
    • Integrated vacuum burst with a shut-off valve in a compact body.
    • Added function to supply burst air into the ejector.
    • It is capable of reliable vacuum burst compared to the conventional single ejector.
    • Switch between vacuum generation and burst air by turning the ejector air supply ON/OFF.

  • Electric Actuator


    Electric actuator compatible with single and multi-axis servo motor drive.Combine the components freely for compatibility with any transport situation.


    • Electric Actuator Gripper 2-Finger Type


      An electric gripper with a long stroke and thin body.With gripping positions that can be set arbitrarily, a wide variety of sizes and types of workpieces can be gripped without changing tools. In addition, it is ideal as a robot hand because it is thin. The built-in controller realizes cable savings and is effective for preventing disconnections.

      • Max. stroke : 140 mm (one side).
      • Max. gripping force : 300 N (one side).
      • Weight : 1.2 to 1.7 kg.

    • Electric Actuator Guide Integrated Rod Type


      The guide integrated rod type reduces the necessity for an attached guide.

      • Improved radial resistant performance.
      • Compatible with offset workpieces.